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15
The deposition of the Al/Al2O3 thin films for the optical applications using sputtering method
Pipat Nantajul
;
พิพัฒน์ นันทจุล
;
TANATTHA RATTANA
;
ธนัสถา รัตนะ
;
Burapha University. Faculty of Science
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Subject
1
Aluminium oxide thin films
1
Aluminium thin films
1
Crystal structure
1
Optical properties
1
Sputtering
1
Surface morphology
1
ความทนทานต่อการกัดกร่อน
1
ฟิล์มบางอลูมิเนียม
1
ฟิล์มบางอลูมิเนียมออกไซด์
1
ลักษณะพื้นผิว
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