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Subject
- 2 Physics and Astronomy
- 1 Atomic layer deposition
- 1 Density functional theory
- 1 Tetrakis(dimethylamido)titanium
- 1 Thin film
- 1 THIN FILM/ CHROMIUM ALUMINUM NITR...
- 1 THIN FILM/ TITANIUM OXYNITRIDE/ R...
- 1 THIN FILM/CHROMIUM ALUMIMIUM NITR...
- 1 THIN FILM/CHROMIUM ZIRCONIUM NITR...
- 1 THIN FILM/TITANIUM CHROMIUM NITRI...
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Date issued
- 1 2022